Spin Rinse Dryer
Model Semiclean-QX-61-2M-A
Overview
Spin Rinse Dryer supplied by Nice-Tech Co., Ltd. Listed under Semiconductors. Key published specifications: Weight (Approx) 260kg; Cassette Type Used KM-40N (100 mm), A182-60MB (150 mm); Chamber Drying Temperature Range Minimum: ≥45°C; Maximum: ≤85°C; Dry Cleanliness Requirement Particles ≥0.3μm < 30 grains/wafer. Contact the supplier through the RFQ form for pricing, lead time and full datasheets.
Technical specifications
| Weight (Approx) | 260kg |
|---|---|
| Cassette Type Used | KM-40N (100 mm), A182-60MB (150 mm) |
| Chamber Drying Temperature Range | Minimum: ≥45°C; Maximum: ≤85°C |
| Dry Cleanliness Requirement | Particles ≥0.3μm < 30 grains/wafer |
| Equipment UPTIME | ≥95%; average monthly trouble-free working time ≥648H |
| Pressure range | 0.2~0.4Mpa; maximum flow: 0.7m³/h |
