SMARPOD P-CLL-CLS Präzisionspositioniersystem
Overview
SMARPOD P-CLL-CLS Präzisionspositioniersystem, from SmarAct GmbH in Shenzhen, Guangdong. Published figures include pdf-download Mechanical, travel [mm] 330 (X); 65 (Y); 17 (Z) and dimensions base plate [mm] 554 x 45.
Technical specifications
| PDF-Download | Mechanical |
|---|---|
| Travel [mm] | 330 (X); 65 (Y); 17 (Z) |
| Dimensions Base Plate [mm] | 554 x 45 |
| Sensor Types | SC |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
