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PECVD Furnace

PECVD Furnace

Overview

PECVD Furnace, listed by Brother Furnace in Zhengzhou, Henan. The listing gives max.temperature 1200℃ (1 hour), chamber material High purity alumina fiber board and thermocouple K type.

Technical specifications

Max.temperature1200℃ (1 hour)
Chamber materialHigh purity alumina fiber board
ThermocoupleK type
Heating length440mm
Constant heating length200mm
Heating elementResistance wire
Power supplySingle phase, 220V, 50Hz
Rated power9kW
RF frequency13.56 MHz±0.005%
Output power500W
Max reflect power500W
RF output interface50 Ω, N-type, female
Harmonic component≤-50dbc
Supply voltage/FrequencySingle phase AC220V 50/60HZ
Cooling methodForced air
External dimension600x600x650mm
Connector typeSwagelok SS joint
Standard range (N 2)0~100sccm, 0~200sccm, or customizable
Response timeGas property: 1～4 Sec; Electrical property: 10 Sec
Pressure range0.1～0.5 MPa
Max.pressure3MPa
Ambient temperature5~45 high purity gas
Pressure gauge－0.1～0.15 MPa, 0.01 MPa/unit
PECVD Furnace Standard SparesPlugging tube 4 pcs
Gas property1～4 Sec;

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