Overview

PECVD Furnace supplied by Brother Furnace. Listed under Industrial Furnaces. Key published specifications: Max.temperature 1200℃ (1 hour); Chamber material High purity alumina fiber board; Thermocouple K type; Heating length 440mm. Contact the supplier through the RFQ form for pricing, lead time and full datasheets.

Technical specifications

Max.temperature	1200℃ (1 hour)
Chamber material	High purity alumina fiber board
Thermocouple	K type
Heating length	440mm
Constant heating length	200mm
Heating element	Resistance wire
Power supply	Single phase, 220V, 50Hz
Rated power	9kW
RF frequency	13.56 MHz±0.005%
Output power	500W
Max reflect power	500W
RF output interface	50 Ω, N-type, female
Harmonic component	≤-50dbc
Supply voltage/Frequency	Single phase AC220V 50/60HZ
Cooling method	Forced air
External dimension	600x600x650mm
Connector type	Swagelok SS joint
Standard range (N 2)	0~100sccm, 0~200sccm, or customizable
Response time	Gas property: 1～4 Sec; Electrical property: 10 Sec
Pressure range	0.1～0.5 MPa
Max.pressure	3MPa
Ambient temperature	5~45 high purity gas
Pressure gauge	－0.1～0.15 MPa, 0.01 MPa/unit
PECVD Furnace Standard Spares	Plugging tube 4 pcs
Gas property	1～4 Sec;